硅电容差压传感器批量测试工装夹具的设计

Design of frock clamp for batch test of Si-capacitive differential pressure sensor

针对硅电容差压传感器测试项目,达到对被测传感器实现批量、快速、连续的测试要求,设计了硅电容差压传感器测试工装夹具,并对其进行了有限元受力分析,充分证明了夹具的设计满足了测试过程对夹具的材料,密封性、轻便性以及各部分结构中心对准等的要求。

In order to meet the differential pressure sensor for requests of Si-capacitive fast, continuous batch test, a frock clamp is designed in this paper. The design is analyzed by finite element analysis method and the results prove that the design can meet the requests for lamp material , airtightness, handiness and alignment of every part configuration centers in the course of test.