俄歇电子能谱仪在材料分析中的应用

Applications of Auger electron spectrometer in material analysis

俄歇电子能谱仪(AES)是建立在电子技术、弱信号检测技术和超高真空技术基础上的一种研究材料表面组成元素的新型分析仪器。本文介绍了俄歇电子能谱技术的基本原理、技术发展和样品制备技术,重点介绍了俄歇电子能谱仪在材料分析(失效分析、表面分析、微区分析等)方面的应用。俄歇电子能谱仪在材料表面性质研究方面,有着不可替代的作用。

Auge electron spectrometer （AES） is a new type analytical instrument for studying element compositions of the surface of material, based on electronic technique, weak signal detection technique, and ultrahigh vacuum technology. This paper describes the basic principle, technical development, and sample preparation techniques of AES, and the applications of AES in material analysis （failure analysis, surface analysis, micro region analysis, etc. ） are described emphatically. AES plays an irreplaceable role in the study of the nature of material surface.