钛酸铋钠钾无铅压电厚膜的制备及表征

Preparation and Characterization of Sodium-potassium Bismuth Titanate Lead Free Piezoelectric Thick Films

采用传统固相法制备(Na0.82K0.18)0.5Bi0.5TiO3无铅压电陶瓷粉体,将质量分数5%的乙基纤维素溶入到质量分数为92%的松油醇中配制粘合剂溶液,加入质量分数2%的二乙二醇丁醚醋酸酯作分散剂,质量分数1%的邻苯二甲酸二丁酯作增塑剂,将陶瓷粉体与粘合剂溶液按3∶1的质量比混合碾磨,用320目筛印刷至带有Pt电极的氧化铝衬底上,经放平、烘烤、预烧、加压及烧结后,制备出厚度约40μm的BNKT厚膜,平均晶粒尺寸为1.1μm,介电常数也达到最大为782,损耗最小为3.6%(10 kHz),剩余极化为24.8μC/cm2矫顽场为71.6 kV/cm,纵向压电系数为79 pC/N。

（Na0.82 K0.18 ）0.5 Bi0.5 TiO3 lead free piezoelectric ceramic powders were prepared by using solid phase synthesis, The organic vehicles consisted 5 % ethyl cetlulose as binder, 2 % 2-（2-n-Butoxyethoxy）ethyl as dispersing agent, 1% dibutyl phthalate as a plasticizer, and 92% α-terpineol as solvent （α-terpineol）. The screen printing pastes were produced by mixing the ceramicpowders and the organic vehicles together with the mas ratio of 3 ： 1. The BNKT thick films were screen printed with a 320 mesh screen mask on Pt electroded 96 % alumina substrates, after leveling, dring, presintering, pressing and sintering the The resulting 40 μm thick films have average grain size of 1.1 μm, maximum relative permittivity of 782, dielectric loss of 3. 6% （at 10 kHz）, remnant polarization of 24.8 μC/cm2 , coercive field of 71.6 kV/cm, and longitudinal piezoelectric coefficient d33 of 79 pC/N.