单频激光干涉系统的研制

Research on Homodyne Interferometer System

单频激光干涉仪采用整体式的布局,提高了测量系统的稳定性和灵敏度,光程差放大技术,提高了系统的分辨率,利用偏振光移相和共模抑制的方法,对干涉仪的4路相互正交的信号进行差分处理,减小光强零漂以及环境变化对系统的影响,最终通过误差补偿修正处理,系统可以获得高质量的输出信号。

Integrated arrangement is adopted in homodyne interferometer to improve stability and sensitivity of the measurement system. Resolution of the interferometer is improved by using optical path difference doubling technique. Polarized laser phase shifting method and common mode inhibiting technique are used to reduce influence from environment and ＂zero shift＂ of the laser intensity by difference processing technique with the four orthogonal mutual signals. In the end high quality output signals will be got through error compensation.