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二代倒像微光像增强器管内质量污染分析

Analysis of Mass Pollution Gen.Ⅱ Inverter Low-Light-Level Image Intensifier
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摘要 针对二代倒像微光像增强器研制中出现的制管成品率低的问题,全面对制管工艺过程中质量污染产生的根源和污染给管子带来的问题进行了分析、讨论,并结合制管进行了证实。有油真空处理设备中的油蒸气返流是造成管子部件污染的主要原因,而制管过程中工艺质量控制不严格和技术不成熟均影响了器件研制的成功率。通过对制管技术的研究和工艺的改进,研制成功了性能指标全面合格的二代倒像微光像增强器。 The problem of low product yield in the development of Gen. Ⅱ inverter low-light-level image intensifier was analyzed. The roots of mass pollution in the process and problem that pollution brings for tube were also discussed. It's proved that oil-vapor return in the oil-vacuum processing equipment is the main reason. Because the control of processing mass isn't strict and technology isn't mature, the product yield of developed device is affected. Through the development of the technology and improvement of process, we developed the qualified Gen. Ⅱ inverter low-light-level image intensifier successfully.
出处 《真空电子技术》 2009年第3期37-39,共3页 Vacuum Electronics
关键词 倒像 微光像增强器 质量污染 成品率 油蒸气 视场暗斑 Inverter Low-light-level image intensifier Mass pollution Production totally Oil-vapor Dark fleck of view field
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参考文献3

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  • 2成建波.碱金属气氛对SEM管硅靶污染的研究[J]应用光学,1981(02).
  • 3王欲知.真空技术[M]四川人民出版社,198.

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