扫描探针显微镜的发展与应用

The Development and Aplication of Scanning Probe Microscope

扫描隧道显微镜和原子力显微镜的发明大大促进了扫描探针显微镜的发展。本文介绍扫描隧道显微镜和原子力显微镜的基本工作原理、发展背景以及以扫描隧道显微镜和原子力显微镜为基础衍生出来的各种扫描探针显微镜的应用。扫描探针显微镜是一种新的探测仪器，它在三维方向上的分辨率均可以达到原子量级的水平，因此在微电子学、微机械学、计量学、化学和生物医学等领域中有广泛的应用前景。

The invention of the scanning tunneling microscope (STM) and the atomic force microscope (AFM) dramatically promoted the development of the scanning probe microscope (SPM). This paper introduces the background, basic principles and developing potential of SPMs, and several novel SPMs and their applications are presented. With resolution of atomic level at three dimensions, SPMs can be widely applied in the field of microelectronics, micromechanism, metrology, chemicals and biology.