微型硅半导体低温温度计的特性与制作工艺

Characteristics and Making Technology of Miniture Silicon Diod Thermometers Used in Cryogenics

论述了微型硅半导体低温温度计的各种优良特性，并运用电子材料及其工艺原理设计了一套保证其具有优良特性的制作工艺。通过测量可知，这种温度计在液氮温度下具有良好的复现性（＜０．０４Ｋ），且其电压信号与温度信号之间具有良好的线性关系，可望在低温工程中获得广泛的应用。

The paper is concerned with the good characteristics of the mini-silicon-diode thermometers used in cryogenics, and the making technology which ensures their good properties is designed according to the technology principle of the electric materials. It is proved by experiment that this kind of thermometer has a good reapitity(<0.04K) at the temperature of liquid nitrogen and accurate voltage-temperature linear relation. Therefore, their widespread application is requiring in the cryogenic engineering.