摘要
本文概述单片伺服加速度计的原理和基本结构，伺服电路的组成和特点，并介绍了ＡＤ公司生产的单片加速度计的性能指标和应用电路，以及信号调节的方法。给出了部分实验数据，最后说明了该加速度计的典型应用。
In this paper,the principles and structure of monolithic servo accelerometer,together with the servo circuit are described.As an example,a commercial monolithic accelerometer from Analog Device is discussed in terms of performance characteristics,applications and signal condition methods.Some related experiment results are also given.Finally,typical applications of this device are presented.
出处
《仪表技术与传感器》
EI
CSCD
北大核心
1998年第2期14-18,共5页
Instrument Technique and Sensor
关键词
单片
伺服
加速度计
电容传感器
静电反馈力
Monolithic Servo Accelerometer,Capacitive Sensor,Electrostatic Feed-back Force,Micro Electro Mechanic System(MEMS).
