铁电薄膜的微图形化研究

Micropatterning of Ferroelectric Thin Films

铁电薄膜在微电子和光电子技术中有着重要的或潜在的应用，可以制作随机存取存储器，热释电阵列探测器，铁电微电子机械系统等。在这些器件的制作过程中，铁电薄膜的微图形化是非常重要的一环。本文简要介绍了几种重要的铁电薄膜微图形化方法及有关研究结果，并比较了这些方法的优缺点。

Ferroelectric thin films have many important or potential applications in microelectronic or optoelectronic fields. They can be used to make some devices such as ferroelectric random access memory(RAM'S), pyroelectric array detectors, ferroelectric microelectrome-chanical system(MEMS). In the preparing process of these devices, the micropatterning of ferroelectric thin films is very important. This paper chiefly introduced several major micropattern techniques of ferroelectric thin films and related research results, and gave some comparisons among these methods.