硅光电探测器光谱响应度测量标准装置

A Standard Facility for Spectral Response Measurementof Silicon Photodiodes

本文介绍了硅光电探测器光谱响应度测量的原理和装置，描述了相对和绝对光谱响应度标定方法，详细分析了引起标定误差的因素和误差合成，简要分析了国际比对结果。本装置的波长范围为３００～１０００ｎｍ，相对光谱响应的不确定度（１σ）为０２１％～０８６％，绝对光谱响应的不确定度（１σ）为０２５％～０８７％。

狝 standard facility and principle for spectral response measurement of silicon photodiodes are introduced. The calibration methods of relative spectral responsivity and absolute spectral responsivity are described. The error sources in the calibration are analyzed in some detail. The results of the international comparison on silicon photodiodes spectral responsivity are analyzed briefly. The wavelength range of the facility is 300～1100 nm, and the uncertainty of relative spectral responsivity is 0.21%～0.86%(1σ), and the uncertainty of absolute spectral responsivity is 0.25%～0.87%(1σ).