多级离子注入法制备太阳选择性吸收膜

SOLAR SELECTIVE ABSORBING COATING PREPARED BY MULTI-GRADE NITROGEN IONS IMPLANTATION

尝试采用离子注入法制备太阳选择性吸收膜层。利用多级离子注入后纵向浓度分布呈梯度分布的原理,对纯铝表面溅射Ti膜后进行了3种方案的多级N离子注入。测试了样品的吸收率和发射率,对各方案制备的样品进行了性能比较,并用X射线衍射仪分析了物相组成,用俄歇扫描系统分析了纵向元素的分布,用弯折法测试了膜层结合力。结果发现,膜层吸收率均在0.94以上,但发射率普遍偏大。太阳选择吸收性最好的样品吸收率α为0.95、发射率ε为0.21,膜层中含有TiN_(0.76)、TiN_(0.6)O_(0.4)、TiO、Al_2Ti、Al_3Ti等物相,氮元素在纵向由最表面到铝基体梯度递减,膜层与基底结合力良好。

Solar selective absorbing coating was prepared by ion implantation. With the theory that ions concentration in portrait after multi-implantation shows gradient distribution, multi-grade N ions implantations of three different schemes were used on Ti film deposited on A1 surface. The absorptance and emittance of samples were tested and compared, surface composition were studied by XRD, we also analyzed distribution of elements in profile by AES, tested adhesive attraction by bending samples repeatedly. The results showed that the absorptance of the coating is above 0.94 but emissivity all some high. The coating with the best solar selective absorption whose a is 0.95 and ε is 0.21 contained TiN0.9, TiN0.6O0.4, Al2Ti, Al3Ti, etc, N ions concentration is gradient descent from the most surface to aluminum substrate, and the coating adhesive ability with substrate is well.