聚焦离子束扫描显像技术

Focus Ion Beam of Scaning and Imanging Technology

聚焦离子束(FIB)是一种将微分析和微加工相结合的新技术,广泛应用于芯片电路修改、研磨、沉积和二次电子离子成像。扫描显像技术是FIB的重要功能,主要用于器件精密加工中,校正束与工件的坐标位置,修正像的畸变。还可以在显示器上观察加工工件的表面形貌,使加工更加直观。FIB其它所有的功能和应用都要在扫描离子显微镜所显示的图像下进行,叙述了用于FIB扫描显像的一种新方法。

Focus Ion Beam （FIB） is a kind of new technology which has combined microanalysis and micromachining, and widely used in modification, grinding, disposition and secondary electronic ion imaging of IC circuit. Scan imaging is the key function of FIB, which mainly used in precision machin- ing of devices and image distortion correction. The image of the workpiece can be observed on display, which makes the machining process more directly. All the functions and applications of FIB should be carried out under the image of scanning ion microscope, and a new method of FIB scan imaging is in- troduced in this paper.