微米/纳米加工中的聚焦离子束技术

Micro-/Nano-Fabrication Using Focused Ion Beam Technology

聚焦离子束系统正成为微细加工领域的有力工具。文章简述了聚焦离子束系统的组成和工作原理,着重介绍了该系统在离子束刻蚀、离子束辅助沉积和离子注入等微米/纳米加工领域的应用,并对聚焦离子束技术的特点及未来的发展前景进行了总结和分析。

Focused ion beam （FIB） technology has become increasingly popular tool for the fabrication of very small structures. In the review, the FIB system and its interaction with solid surface was introduced first. The FIB technology was examined with emphasis on its ability to carry out ion milling, ion-assisted deposition and ion implantation. Finally, concluding remarks were provided where the strength and weakness of the techniques studied were summarized and the scopes for technological improvement and future research were recommended.