高g值加速度条件下微结构动态测试技术研究

Dynamic Testing Technology for Microstructure in High-g Acceleration

为研究微结构在高g（重力加速度）值加速度环境中的动态特性，研究了高g值加速度环境下微结构动态测试技术，构建了高g值环境下微结构动态测试装置，利用高速转台产生的离心加速度实现高g值加速度环境，采用基于压电陶瓷的底座冲击激励装置实现在高g值加速度环境中对微结构的激励，应用内置自测试技术解决了高g值环境下微结构动态响应信号采集问题，测试了在0～10000g加速度环境下微结构的动态特性，获得其谐振频率与阻尼比等参数。测试结果表明，当微结构发生大变形时，其谐振频率会随着外部加速度增大而得到提高。

To study the dynamic characteristics of microstructures in high g acceleration environment, the dynamic testing technology in high g acceleration was systematically studied and the dynamic testing equipment was developed. The high g acceleration environment was generated by the centrifugal acceleration produced with the high speed centrifugal turntable. The base excitation device which used the piezoceramics as the driving source was established and the impulse excitation in high g acceleration was implemented. With built-in self-testing（BIST） technology, the dynamic response signals of the microstructure were obtained by the integrated sensing element in it. Using the dynamic testing equipment, the experiments for microstructures in different steady high g accelerations from 0g to 10 000g were performed, and the dynamic characteristics of the microstructure such as natural frequency and damping ratio were obtained. The experimental resuits show when the microstructure is in large deflection under external high g-force, the natural frequency of the microstructure gets higher as the acceleration increases.