摘要
活性炭是NBI低温吸附泵吸附面的关键组成部分,其性能是决定NBI低温泵抽气性能的关键因素之一。本文选取JX-6型椰壳活性炭,用全自动比表面积及孔径分析仪(ASAP2020)在液氮温度下对其性能进行了测试,并对实验数据进行了分析。实验结果表明,该活性炭具有良好的孔隙结构和较强的吸附性能,其最大吸附量达到252cm3/gSTP。为进一步研究NBI低温泵的低温吸附抽气提供了理论依据。
Activated carbon is an integral part of the adsorbing surface of NBI cryoadsorption pump, and the performance of activated carbon is one of the most important factors which determine the capability of gas pumping out of NBI cryopump. The JX-6 coconut shell charcoal was chosen as activated carbon sample to be tested at liquid nitrogen temperature by using the fully automatic analyzer of specific area and pore size （ASAP2020） for its performance, with the resultant data analyzed. The results indicated that such an activated carbon has favorable pore structure and high adsorptivity by which the maximum adsorption quantity can be up to 252cm^3/g STP. A theoretical basis is thus provided for further R＆D of low-temperature adsorption by NBI cryopump
出处
《真空》
CAS
北大核心
2009年第4期53-56,共4页
Vacuum
基金
中国科学院知识创新工程青年人才领域专项前沿项目资助(编号:075FCQ0128)
关键词
吸附
活性炭
液氮温区
比表面积
孔径分布
adsorption
activated carbon
liquid nitrozen temperature
specific area
aperture distribution
