ICP-OES在测定三氯氢硅中硼磷含量的应用

Brief introduction of application of ICP-OES in content determination of boron and phosphorus of trichlorosilane

介绍了采用ICP-OES测定三氯氢硅中硼、磷含量的原理及测量方法,试验结果表明,本方法灵敏度高、可靠性好、操作简单,可取代ICP-MS。

The principles and determination method of contents of boron and phosphorus in trichlorosilane with ICP-OES were introduced. The determination method can replace ICP-MS with some advantages, including high sensitivity, feasibility and simple operation.