摘要
本文详细讨论了VDMOS终端保护环结构各部分,即保护环、保护环间隙和场板的作用及设计方法。结合600V VDMOS的外延电阻率和厚度,一种600V VDMOS终端保护环结构被成功设计出来。
The role and the design method about guard rings, the gap between guard rings and field plates in VDMOS termination is discussed in the paper in detail. A sort of VDMOS termination is designed successfully according to the resistivity and thickness of epi of VDMOS with breakdown voltage of 600V.
出处
《中国集成电路》
2009年第8期58-61,共4页
China lntegrated Circuit
关键词
保护环
保护环间隙和场板
Guard rings
the gap between guard rings and field plates
