C-H-Cl气相体系生长金刚石的相图计算

Calculation of Phase Diagram for Diamond Growth in C-H-Cl System

用非平衡热力学耦合模型计算得到了C-H-Cl气相体系生长金刚石的相图，并与报道的实验结果符合很好．比起C-H体系生长金刚石的相图，该相图中的金刚石生长区明显移向低温方向，说明加入氯有利于降低金刚石的生长温度．通过化学反应机理的分析探讨了加入氯对金刚石生长温度和生长速率的影响．

According to the non-equilibrium thermodynamic coupling model, a phase diagraxn for diamond growth in C-H-CI system was calculated. A diamond growth region whiCh is in goodagreement with many reported experiments exists in the calculated phase diagram. Compared tothe diamond growth region in the phase diagram of diamond growth in C-H system, the diajmondgrowth region presented here moves toward the end of low substrate temperature. The effectof chlorine addition on diamond growth in the vapor phase was also discussed according to thereaction mechanism.