直线度分析仪样机设计及其检测精度分析

Prototype and Precision Analysis of Straightness Testing Apparatus

针对大长度范围直线度测量的要求,根据光学自准直原理研制出一台高精度直线度分析仪,其精度达到0.1″,而1′以内的示值误差小于0.5″。通过与ELCOMAT3000型自准直仪的测角结果对比,两组检测数据非常接近,可知此分析仪能满足对应于直线度为0.5μm的测角参数。对此仪器在检测过程中可能出现的不确定度进行了定量分析,得到了实验过程中相应的整体标准不确定度为0.23″。

In order to measure the straightness with large scale, the prototype of the straightness testing apparatus was developed based on the autocollimation theory. The precision of the apparatus reaches to 0. 1″, and the indication error is less than 0. 5″. The angle data measured by ELCOMAT 3000 autocollimation is close to the data measured by the straightness testing apparatus. The angle, corresponding to the straightness parameter which is larger than 0. 5μm, can be measured by the prototype. The uncertainty of the prototype in the experiment was analyzed quantificationally. The global standard uncertainty of the prototype equals to 0. 23″.