多层膜气体传感器研制与特性试验

Fabrication and sensitivity test of multi-film gas sensor

针对粉末烧结型SnO_2基气体传感器功耗大、交叉敏感、工作温度高的问题,研制了多层复合薄膜型气体传感器,以抛光的耐热石英玻璃为基片,真空磁控溅射50～70nm厚度的SnO_2薄膜,在SnO_2薄膜上分别溅射不连续的ZnO、Al_2O_3、InO等薄膜,传感器背面溅射30μm的Ni_(80)Cr_(20)电阻合金作为传感器加热电阻,用薄膜热电偶测量传感器工作温度。测试了不同的复合膜对传感器灵敏度和选择性的影响,并对传感器的吸附与解吸速度进行了测试,薄膜传感器达到相同灵敏度所需的工作温度比粉末烧结型传感器下降100～150℃,吸附解吸速度比粉末烧结型快。

To solve the problems of high energy consumption, cross-sensitivity and high working temperature, we developed some multi-film gas sensors based on powder metallurgic SnO2 sensors. Polished quartz Pyrex is used as the substrate, 50 - 70 nm thickness SnO2 film is deposited with RF magnetron sputtering method, and uneontinuous ZnO, Al2O3, ZrO, InO and TiO2 films are deposited on the SnO2 film. 30 μm thickness Ni80Cr20 resistance film is deposited on the back of the sensor. We measure the working temperature of the sensor with a film thermal couple. We measure the sensitivity of the sensor and the selectivities of different complex films, and also measure the velocities of absorption and desorption. Compared with powder sensors, the working temperature declines by 100 - 150℃ and the velocities of absorption and desorption increase.