二元位相校正技术在相控列阵光学系统中的应用

Binary Phase Corrector for Phased Array System

提出一种使用二元光学器件实现位相校正的新方法。在子孔径拼接的相控列阵光学系统中，采用二元光学器件二元位相校正板对子孔径拼接后产生的残留波像差进行校正，既达到位相校正技术要求，又大大简化系统结构并减小了系统的尺寸和重量。所制作的二元器件具有８个台阶，套刻精度达到２μｍ，并使残留波像差降为原来的一半。

We present a novel method for phase correction by using binary optical elements (BOEs). This method considerably simplifies the structure of the system and decreases its size and weight. This is a typical application of binary optics in modern optical system. In the phased array system, we use binary phase corrector to correct the residual wavefront aberrations. The BOE has eight steps. The experimental result shows that this element decteased the wavefront aberrations to half of the original value.