基于干涉原理精确对中折衍混合器件的技术研究

THE PRECISELY ALIGNED TECHNIQUE OF HYBRID REFRACTIVE DIFFRACTIVE ELEMENTS BASED ON INTERFERENCE PRINCIPLE

在折衍混合光学系统的加工和装配过程中，折、衍器件间的对中精度严重影响混合器件的质量和性能，但是由于衍射器件与传统折射器件的显著差异，传统的对中手段已不再适用，如何简便实现二者的精确对中是混合光学系统实用化过程中亟待解决的问题之一本文提出利用干涉原理简便地实现衍射器件与折射器件的高精度对中，理论分析和实验结果表明该对中装校方法是有效可行的。

In the process of fabrication and assembly of hybrid diffractive refractive optical systems,the quality and performance of the hybrid devices significantly depend on the alignment accuracy.Because of the large difference existed between refractive and diffractive elements,the conventional alignment method does not fit to be used in the hybrid optical system.How to simply achieve the precision alignment of hybrid diffractive refractive elements is an urgent problem needed to be solved.This paper presents that based on interference principle,high alignment accuracy can be easily achieved.Both the theoretical analysis and experimental results have shown that aligned by this method a system can meet the demands of various optical systems,and that this simple method is feasible and effective.