基于光栅光调制器的投影显示光学系统设计与实验

Design and Experiment of Projection Display Optical System Based on Grating Light Modulator

基于微机电系统(MEMS)光栅光调制器在静电压驱动下可改变其衍射效果,并在光学4f系统中实现光信息处理,从而应用于投影显示。在典型4f光学系统基础上,优化设计了基于MEMS光栅光调制器的投影显示系统,根据菲涅耳衍射分析了该系统;分别利用两种光栅光调制器实验样品在设计的光学系统中进行了显示实验研究。结果表明,该系统可实现投影显示;配以驱动电路可实现动态显示,并可进行工作电压、吸合电压、响应频率等特性测试。

A micromachined optical modulator called grating light modulator （GLM） with electrostatic actuation, fabricated by the conventional process, is described. GLM modulates the light energy by changing the distance of the movable grating and the underlying fixed reflector, which can be applied in projection display in four-focus optical system. With the typical four-focus optical system, the projection display optical system based on GLM is optimized and designed, which is analyzed by Fresnel diffraction. The static and dynamic display experimental systems are designed. The experimental results indicate that the GLM technique has characteristics that make it suitable for projection display applications and several characteristic measurement experiments can be carried on by using such system, such as the working voltage, the pull-in voltage, the response frequency and so on.