时栅传感器电气误差分析及补偿

Electric Error Analysis and Compensation for Time-grating Sensor

测量仪器误差分析是测量仪器研制过程中的重要一环。为了确定影响仪器测量精度的主要误差因素,本文讨论了时栅传感器电气误差中零电平误差、电源误差的产生原因,提出用误差补偿技术来提高时栅的测量精度,对时栅传感器的批量化生产具有重要作用。

Error analysis of measuring instnanent is a very important aspect in the development and manufacture of the instrument. In order to find the major error factors which affect the instrument accuracy, the reasons causing electric error are analyzed, the electric error consist of zero voltage error and power error. The error compensation technology is proposed to improve the measurement accuracy of time-grating sensor. Improving accuracy will play an important role in the mass production of time-grating sensor.