利用散射辐射分布矩测量表面轮廓均方根斜率

Measurement of root-mean-square slope of profile using the moments of laser scattering distribution

为了利用激光散射分布测量表面粗糙度参数,从分析高斯粗糙表面非傍轴散射光能量的角分布特征与轮廓均方根斜率之间的关系,得到了利用散射角分布进行粗糙表面横向粗糙度参数的测量方法。提出了散射光的两个特征值:辐射立体角密度矩M(θ)和M(φ),用以表征散射光能量立体角分布情况,并给出了在非傍轴远场条件下的测量和计算方法。实验证明,给出的特征参数能够得到散射光能量立体角分布特征并可用于测量粗糙表面横向形貌参数。

In order to measure the roughness parameters of surface, from analyzing the relationship between the angle distribution of scattering radiance from Ganssian rough surface and the root-mean-square slope of profile, a new measurement for the horizontal profile parameters of rough surface using laser scattering distribution on solid angle was derived. Two values for scattering light features were presented, which are the moments of solid angle distribution of radiance,M（θ） and M（φ）, to represent the laser scattering distribution on solid angle. And the measuring and computing methods were obtained. Experiments proved that the parameters presented can procure the scattering light distribution features on solid angle and can be used for the measurement of the horizontal profile parameters of rough surfaces.