激光等离子体软X射线源靶材的选择及特性

TARGET MATERIAL CHOICE AND ITS CHARACTERISTIC OF LASERPRODUCED PLASMA SOURCE

给出了用于软Ｘ射线投影光刻的激光等离子体源靶材的选择依据。计算了类锂氧离子的辐射跃迁波长和相应的跃迁速率值。并通过与常规金属靶的比较，给出了实验靶的一些特性。

Choice criteria on target material for soft Xray projection lithography source were proposed in this paper. Spectral data of Lilike oxygen ion were given based on this criteria. The characteristics of new plasma target were given compared with conventional metal targets .