摘要
利用激光干涉技术将透镜中心偏差量转换为一光点相对于某特定点的偏移量，通过ＰＳＤ测定此光点的位置即可确定中心偏差的大小和方向，并由此而控制执行器正确调节透镜位置。本文分析了系统的光学结构和信号的光电特性，并以此为理论依据设计出ＰＳＤ测量电路。
By means of interference technology, the lens centering error may be converted to the relative position of a optical point to some special space points. The determination of measuring error can be made by testing the position of the optical point. In this paper, the optical system and circuit are given and the photo-electric signal's features are analyzed in detail, which put out the theorical base for the real signal processing.
出处
《仪表技术与传感器》
CSCD
北大核心
1998年第7期31-33,共3页
Instrument Technique and Sensor
