利用脉冲负反馈压缩准分子激光脉冲

Excimer laser pulse compressed with pulse feedback

分析了准分子激光脉冲在放大过程中的展宽现象。将饱和开关技术应用于放电泵浦激光器放大腔的放大压缩,发展了脉冲负反馈饱和压缩技术。利用该技术在天光一号系统前端LPX-150激光器上成功获得能量100 mJ、脉宽10 ns的脉冲输出,其空间分布均匀性保持在3%以内。这证明该技术可与无阶梯诱导非相干技术联合使用,在保证光束均匀性基础上进行脉冲压缩。

The broadening of excimer laser pulses during amplification was analysed. To attain a shorter laser pulse, a compressing technique called pulse negative feedback was developed with the gain saturation switch applied to the amplification in an discharge pumping exeimer laser. Combined with the echelon-free induced spatial incoherence technique, it can output shorter pul- ses with the beam uniformity maintained. A 100 mJ, 10 ns laser pulse was achieved in the LPX-150 excimer laser which acts as the laser source of the ＂heaven- I ＂ system. The spatial uniformity of the pulse remained within 3%.