基于WO_3和NiO_x的单基片全无机智能窗器件的快速制备及其性能的研究

Fast fabrication of single-substrate inorganic all-solid state smart window device based on WO_3 and NiOx and sdudy on its performance

介绍了利用磁控溅射和一种液氮冷却装置，制备非晶态WO3薄膜、非晶态LiNbO3薄膜和纳米微晶态NiOx薄膜的有效方法。进而，使用这种液氮冷却装置，采用全程基片冷却方法，制备了单基片无机全固态智能窗——G｜ITO｜NiOx｜LiNbO3｜WO3｜ITO器件。实验结果表明，在400800nm的可见光范围内，该器件经过1000次循环后，它的漂白态透射率为63．0％，而着色态透射率为10．6％，这一初步工作表明，基片冷却方法应该是制备有优异性能的无机全固态电致变色智能窗的有效方法。

In this paper we introduce a effective method to prepare amorphous-porous WO3 ,amorphous LiNbO3, and nano-microcrystalline NiOx films by magnetron sputtering and a cooling apparatus based on liquid nitrogen. Therefore, using the cooling apparatus, We have fabricated single-substrate inorganic all-solid state smart window device consisting of G/ITO/NiOx/LiNbO3/WO3/ITO. The experimental results show that in the visible range between 400 and 800nm, transmittance average of its bleached state after 1000th cycle is 63.0% ,whereas transmittance average of its colored state after 1000th cycle is 10.6 %. This preliminary work indicates that the method of cooling substrate should be a effective means to fabricate inorganic all-solid state smart window device having excellent electrochromic performance.