摘要
Composites consisting of hydrogenated amorphous silicon （a-Si： H, inorganic） and zinc phthalocyanine （ZnPc, organic） were prepared by vacuum evaporation of ZnPc and sequential deposition amorphous silicon via plasma enhanced chemical vapor deposition （PECVD）. The optical and electrical properties of the composite film have been investigated. The results demonstrate that ZnPc can endure the temperature and bombardment of the PECVD plasma and photoconductivity of the composite film was improved by 89.9% compared to pure a-Si： H film. Electron mobility-lifetime products/lr of the composite film were increased by nearly one order of magnitude from 6.96 × 10^-7 to 5.08 × 10^-6 cm2/V. Combined with photoconductivity spectra of the composites and pure a-Si： H, we tentatively elucidate the improvement in photoconductivity of the composite film.
Composites consisting of hydrogenated amorphous silicon （a-Si： H, inorganic） and zinc phthalocyanine （ZnPc, organic） were prepared by vacuum evaporation of ZnPc and sequential deposition amorphous silicon via plasma enhanced chemical vapor deposition （PECVD）. The optical and electrical properties of the composite film have been investigated. The results demonstrate that ZnPc can endure the temperature and bombardment of the PECVD plasma and photoconductivity of the composite film was improved by 89.9% compared to pure a-Si： H film. Electron mobility-lifetime products/lr of the composite film were increased by nearly one order of magnitude from 6.96 × 10^-7 to 5.08 × 10^-6 cm2/V. Combined with photoconductivity spectra of the composites and pure a-Si： H, we tentatively elucidate the improvement in photoconductivity of the composite film.
基金
supported by the State Key Development Program for Basic Research of China(No.2006CB202604)
the National Natural Science Foundation of China (Nos.60576036,50773085,60736034)
the National High Technology Research and Development Program of China (No.2006AA05Z405)
