摘要
本文采用微机械加工研制压电微马达，用硅平面工艺首次制作了硅转子并装配成直径Φ１．８ｍｍ压电微马达，得到转速为３０～５０ｒ／ｍｉｎ。同时对转子重量、形状、激励频率与转速关系进行研究。
The authors have developed a kind of piezo-micromotor using the micromachining,manufactured firstly the Si-rotor using the Si planar technology and assembled a kind of piezo-micromotor with diameter 1.8mm .The rotating speed is 30-50rpm.In addition,the anthors have studied the relationship between the rotor weight,form,exciting frequency and rotating speed.
出处
《仪表技术与传感器》
CSCD
北大核心
1998年第6期11-12,10,共3页
Instrument Technique and Sensor
基金
国家攀登计划"微电子机械系统"资助项目
