一种电容式微加速度计的系统设计与温度影响分析

System Design and Temperature Affection Analysis of a Capacitive Micro-accelerometer

在系统级分析方法的基础上,设计一种梳齿式加速度计的系统模型,相对常用的实体建模方法,该模型能够快速精确地实现模型的频谱分析及参数的优化.由于硅是一种热敏材料,温度的变化会引起结构变形,形成较大的输出误差,故对温度变化引起几何结构的变化进行参数仿真研究,得到加速度计温度误差最小时的工作环境温度范围.

A system model of comb micro-accelerometer is designed using the system level analysis. Time-domain and frequency-domain analysis are carried out for the system model. Because polycrystal silicon is a material easily affected by temperature, the temperature variation can cause displacements that will bring error for output. So temperature parameter is studied and the range in which the temperature error is smaller is given.