电子回旋共振(ECR)离子源的研制

DEVELOPMENT OF AN ELECTRON CYCLOTRON RESONANCE (ECR) ION SOURCE

介绍了一种电子回旋共振（ＥＣＲ）离子源的设计和结构．为了获得长寿命、高等离子密度以及高效传输微波功率，作者通过实验研究发现，利用合适的微波输入三层复合窗（石英、Ａｌ２Ｏ３陶瓷和ＢＮ）是很有效的，而且采用两个带有磁轭的螺线管线圈能够产生满足共振条件（８７．５ｍＴ）和约束等离子体的轴向磁场．利用该离子源制备了Ｃ∶Ｎ团簇纤维．当引出电压为－５００Ｖ时，在靶室中的φ４０ｍｍ样品上能获得９０ｍＡ的离子流，其源的寿命可超过３００ｈ．

The design and construction of an electron cyclotron resonance (ECR) ion source is introduced.An optimized triple layer window (quartz,alumina and BN) was found to be very effective in order to achieving a long lifetime of ECR ion source,high density plasma as well as high quantity introducing microwaves.The axial magnetic field to satisfy the ECR condition(87.5mT) and to provide plasma confinement was produced by two solenoid coils with iron yokes.C∶N cluster fibre was prepared by using this ECR source.When extraction voltage was up to -500V,ion currents of 90mA was obtained on a sample with diameter of 40mm in the target chamber.The lifetime of ECR source waw more than 300h.