消除AlN陶瓷基片色斑

Elimination of color spots on AlN ceramic substrates

ＡｌＮ基片的色斑会影响外观，引起用户对基片性能的疑虑。通过ＸＰＳ、热力学分析等方法，证实了碳的金属化合物是造成氮化铝陶瓷色斑的根源；采取控制氮化铝粉质量、改进排胶和烧结工艺、疏通气路等措施，可消除色斑。

olor spots affect the appearance of AlN ceramic substrates It is proved, through XPS and thermodynamic analysis, that the color spots are caused by carbide The spots can be eliminated by improving the quality of AlN powder, binderburningout technology, and gas path conditions(4 refs)