硅微陀螺模态频率温度特性的研究

Research on Temperature Characteristic of Mode Frequency of Silicon Micro-Gyroscope

硅微机械陀螺的零位输出受温度影响较大,为提高精度,对其进行温度误差补偿很有必要,而陀螺表头真空封装后内部温度难以直接测量。通过研究模态频率与温度之间的关系,发现驱动轴谐振频率与温度之间存在很好的线性相关性,同时具有很好的温度重复性。由于谐振频率的精度很高,所以用谐振频率测量温度会有很好的分辨率。因此,可以利用驱动模态的谐振频率来标定陀螺表头内部的温度,为下一步的温度补偿提供新的方法。

Temperature is one of the most important factors which affect the zero offset stability of the Silicon micro-machined gyroscope. After vacuum package, the inner temperature of gyroscope chip is difficult to measure directly. By research on the temperature characteristic of mode resonant frequency, the theoretic model is given. It is shown that drive mode resonant frequency .is proportional linearly to the temperature and simultaneously take on perfect temperature repeatability. The resolution of measured temperature can be improved due to the high precision of resonant frequency. Consequently, with some calibration, the drive frequency can be used as a gauge of the inner temperature of gyroscope chip, which provides a new method for further temperature compensation.