高重复率小型准分子激光开关电源设计

Design of a switching power supply for high repetition excimer laser

设计了一种用于高重复率准分子激光器的正弦恒流型高压开关电源,逆变主电路采用串联谐振回路,输出电压10kV至15kV,重复率1Hz至300Hz。分析了逆变回路工作情况,介绍了变压器的参数计算方法和所采取的抗电磁干扰措施。电源体积小巧,运行稳定。经改进可使重复率提高到600Hz。

This paper introduces a sine- wave constant current switching power supply for high repetition excimer laser. The series resonant tank circuit was employed in this system. This power supply is capable of giving output voltages of 10 - 15kV at repetition rates of 1 - 300Hz. Several methods employed to suppress the EMI and this system can work reliably in excimer laser. The volume of this power supply is small and it could be operating at 600Hz after improving.