谐振膜式密度传感器

Research on Vibration Film-type Liquid Density Sensor

设计了一种基于谐振理论的新型振膜式液体密度传感器,实现了液体密度的实时在线测量。谐振膜式密度传感器由谐振膜、激励单元、拾振单元和闭环控制电路与检测电路组成。传感器利用谐振膜与不同密度液体接触,液体密度与谐振膜等效质量具有相关性,而谐振膜等效质量的变化直接影响谐振膜的谐振频率,依靠检测谐振膜谐振频率来实时液体的密度测量。这种谐振膜式密度传感器制作工艺简单、信号稳定、测量精度较高。实验结果表明:谐振膜式密度传感器具有较高的重复性、灵敏度和测量精度,满足实时在线测量的要求。

A new vibration membrane-type liquid density sensor based on resonance theory was presented to achieve real-time and online measure of the liquids density. This vibration membrane-type liquid density sensor consisted of resonant membrane, exciter, pick-up, signal detector electrocircuit system. When working, the resonant membrane contacts with the liquid density and the change of the equivalent mass of the resonant membrane directly affects the resonant frequency of the membrane, the liquid density can be measured by detecting the resonant frequency of the membrane. The sensor possesses the advantages of easy fabrication and fine resolving ability. Experiment result shows that this sensor has good repeatability, sensitivity, and precision of the sensor make it meet the demand of real-time online measurement.