基于Modbus的半导体扩散/氧化工艺控制系统

Development of Semiconductor Diffusion/Oxidize Control System of Craft Based on Modbus

针对传统的扩散/氧化控制系统温度控制精度、生产工艺控制能力以及自动运行能力较低,难以实现集中管理的现状,提出了一种基于Modbus的半导体扩散/氧化工艺控制系统。系统以可编程逻辑控制器(PLC)为核心,以自整定PID算法为控制器,采用Modbus协议通信。可有效实现温度、气体流量等参数的下传及各检测数据、状态的上传,完成对扩散炉温度工艺曲线和辅助工艺的控制。实现了半导体扩散工艺的自动化,提高了温度控制精度以及工作效率。应用结果表明,该温控系统具有良好的自适应性和鲁棒性。

Aiming at the current conditions of traditional diffusion / oxidize control system which precision, ability to produce the control ability of the craft and automatic operation is the getting lower relatively, it is difficult to realize the current situation of centralized management, diffusion / oxidize the control system of the craft after putting forward a kind of intelligence. This system regard programmable logic controller （PLC） as core, with fuzzy self-turning PID algorithm for the controller, adopts Modbus agreement communication. Under the control of this system, realizes parameter effectively and so on temperature, gas flow amount downloading and each examination data, the condition upload, completes to the diffusion furnace temperature craft curve and the auxiliary craft control. Has realized the semiconductor diffusion technology automation, increased the temperature control precision as well as the working efficiency. The application result indicated that this controls the system to have well auto-adapted and stupid and excellent.