摘要
提出了一种由压电晶片驱动的新结构微泵,采用精密机械加工工艺制作而成。设计了预应力阀膜,组装压电微泵,对预应力阀的可靠性和压电微泵的液体输送特性做了研究。通过系统的实验研究证明:预应力压电泵具有很好的防倒吸能力,稳定性高,具有很好的工作性能,在250 V,200Hz方波信号下,流速可达5.502 7mL/min,且适于微型化,可为该类型泵的实际应用提供有意义的借鉴。
The design and realization of pre-stressed valve are described and it is applied into the micropump. Based on precision machining, the pump is fabricated and assembled. Relevant experiments are carried out to study the reliability of the pre-stressed valve and the transport property of the pump. The results indicate that prestressed valves can prevent fluid reverse effectively and the pump has excellent stability and great performance, under the square wave driving voltage of 250V ,200 Hz,the pump is able to provide flow rates up to 5. 502 7 mL/ min, and this kind of pump also can be used in micro-applications. The design of the pre-stressed valve and the structure of the pump are useful to the development of the applied piezoelectric micopump.
出处
《传感器与微系统》
CSCD
北大核心
2009年第8期30-32,36,共4页
Transducer and Microsystem Technologies
基金
上海市科学技术委员会科研计划资助项目(08441900100)
关键词
预应力
压电泵
稳定性
传输特性
pre-stressed
piezoelectric pump
stability
transport property
