弱磁场中辉光放电等离子体参数诊断

The Diagnosis of the Plasma Parameters of Glow Discharge under Weak Magnetic Field

利用静电探针对弱磁场中直流辉光放电等离子体参数进行了诊断，测量了等离子体的密度和温度．结果表明，离子密度随放电电流的增加而增加，随气压的升高而升高；电子温度随放电电流的增加而增加，随气压的升高而降低；在磁场中，离子密度随磁场的增强而增大，电子温度随磁场的增加而减小．实验结果与理论计算结果基本趋势相一致．

The plasma density and temperature for oc glow discharge under the weak magnetic field have been diagnosed by electric probes. The results show that the ion electron temperature increases with the discharge current and the gas pressure decreases with increasing the gas pressure. Under the weak magnetic field, the ion density increases as the magnetic field increases, but the electron temperature decreases with the magnetic field increasing. The experimental results agree with the theoretical ones.