99氧化铝陶瓷基片的水系流延成型研究

STUDY ON THE AQUEOUS TAPE CASTING FOR 99AL_2O_3 CERAMIC SUBSTRATE

采用水系流延法制备99氧化铝陶瓷基片,研究了pH值和分散剂用量对氧化铝浆料的影响,塑化剂和粘结剂的用量对流延素坯片及其烧结性能的影响。实验结果表明,在pH值为9.0和分散剂聚丙烯酸(PAA)用量为0.5-0.6wt%的条件下,可制备出高固含量(45vol%)、分散稳定的氧化铝浆料。当粘结剂聚乙烯醇(PVA)用量为4.5wt%、粘结剂和塑化剂聚乙二醇(PEG)的用量比为1∶0.7时,可获得表面光滑、无缺陷、组分均匀、强度高、柔韧性好的99氧化铝陶瓷坯片。坯片经烧结后得到表面光滑、平整、相对密度高达99.5%的99氧化铝陶瓷基片。

In this paper, the Al2O3 substrates were prepared via aqueous tape casting. The effects of the pH values and polyacrylic acid（PAA） dispersant content on the preporties of Al2O3 suspensions have been studied.The results show that a high solid loading（45vol%） and dispersve Al2O3 suspensions could be obtained via adjusting pH=9.0 and PAA dispersant content as 0.5-0.6wt%. The green tapes could be produced in the condition of optimizing 4.5wt% of Vinyl Alcohol（PVA） as binder and 1 ： 0.7 weighty proportion of PVA to plasticier of Ethylene Glycol （PEG）. Finally, the green tapes with smooth surface, sufficient strength and flexibility were produced via the slurry and the free-crack 99Al2O3 ceramic substrates with rdative density （ 99.5%） were achieved after sintering.