凸极轴瓦结构的微晃动马达制作与性能研究

MANUFACTURE AND STUDY ON CHARACTERISTICS OF THE WOBBLE MICROMOTOR WITH SALIENT BEARING

采用了一种凸形轴承结构的硅基微晃动马达。它具有工艺简单，与ＩＣ工艺完全兼容；还具有摩擦力矩小，大大地减少了转子的摩擦阻力。实现了电启动，最小启动电压４５Ｖ，最小维持电压２５Ｖ。维持晃动的最低脉冲激励频率５０Ｈｚ。最高转速６００ｒｐｍ，转速０～６００ｒｐｍ连续可调、转动平稳，无抖动。寿命达几小时。

his paper reports the manufacture of the wobble micromotor with salient bearing. It has small torque of the friction. The process is very simple. Our salient bearing polysilicon motor has been operated with excitations as low as 25V across the 2.2μm rotator/stator gaps. It could smoothly rotate by applied voltage in air without electrically levitating or gas levitating. Its rotation speed can be controlled by excitation frequency continually between 0 to 600rpm.