环状SMA微夹钳工作原理的研究

STUDY ON THE WORKING PRINCIPLE OF SMA MICROGRIPPER

利用ＳＭＡ的形状记忆特性，制作微小的功能夹持器，用于微机械零部件的装配中；并从马氏体热弹性变形出发，对这种ＳＭＡ微夹钳的设计原理、动力学特性、变位量的可控性及其与温度的关系进行研究。分析了ＳＭＡ微夹钳工作过程中的能量关系，并对具有共性的微夹钳尺寸效应问题，即夹持粘附力问题，进行了研究和讨论。

e intend to manufacture tiny part with SMA, and use it as functional gripper in MEMS assembly. Based on the thermal elastic transformation of alloy and the gripper opennesstemperature relation the work principles, dynamic characteristics of the SMA microgripper and the energy transform relation during the gripper working process are discussed in this article. At last, the adhere forces for microgripper in micromanipulation are introduced and the methods to reduce these adhere forces are proposed.