静电放电机理、影响及离子发生器在电子设备静电防护上的应用研究

Research on Ionizer Applying on Electron Equipment for ESD prevention

静电放电问题是困扰包括半导体晶圆,液晶面板,太阳能模块的生产和加工等众多电子、光电子行业的顽疾。被动防止静电放电需要在加工材料选择,工艺流程优化,生产环境温湿度控制等众多环节加以严格限制,其过程复杂,管控起来难度较大。主动预防静电放电的最佳方式就是采用在电子、光电子加工设备上安置离子发生器中来和电子、光电子器件上的多余电荷。离子发生器的性能特点,参数设置等对电子、光电子设备的静电放电控制起着至关重要的作用。

ESD （Electro Static Discharge） is a severity factor that affect yield of electron and photoelectron industry, specially in wafer, LCD panel, solar module factories.To prevent Electro Static Discharge, choosing material, optimizing technical process, controlling temperature and humidity in environment should be limited tightly. It＇s difficult to operate widely for cockamamie and complex sections, the optimal method to prevent ESD actively is affix ionizer instrument in electron and photoelectron equipment. Those ionizer can neutralized redundancy electrons. And the performance and parameter setting of ionizer take the important effect on ESD controlling.