摘要
平晶表面形状的判断对于平晶平面度的计算非常重要,错误的判断将会直接导致计算错误。该文通过对加压分析判断法原理的介绍,讨论在实际检定工作中的注意事项。灵活掌握该方法不仅对于平晶检定工作,而且在使用平晶测量量具或工件表面平面度时都非常重要。
The judgement method by compression analysis of optical flat surface shape, It's very important for the calculation of the optical flat flatness, the wrong judgement will give a wrong calculation results. In this paper the principle of the judgement method by compression analysis, discussed in the actual verification work. This method is very important, not only to the verification work of optical fiat, but also in the use of optical fiat on the measurement of the part surface flatness.
出处
《上海计量测试》
2009年第4期19-22,共4页
Shanghai Measurement and Testing
关键词
平晶
平面度:加压分析判断法
平面等厚干涉仪
optical flat
flatness
the judgement method by compression analysis
equal thickness interferometer