SOI光波导器件的研究进展

RECENT PROGRESS IN SOI-BASED OPTICAL WAVEGUIDE DEVICES

近年来随着SOI晶片制备技术的成熟,SOI基波导光波导器件的研究日益受到人们的重视.介绍了弯曲波导、光耦合器、可调谐光衰减器、光调制器和光开关等常见的SOI基光波导器件的一些研究进展.

Recent years, with the maturation of facture technology of SOI（silicon-on-insulater） wafer, the research on SOI-based optical waveguide devices have attracted more and more attentions. In this paper, the recent developments in SOI-based optical waveguide devices, including bend waveguide, optical coupler, variable optical attenuator, optical modulator, optical switch, are reviewed.