摘要
介绍了目前正在研究和应用的金刚石薄膜抛光技术，并对它们的原理、特点和适用范围进行了分析和总结。
This paper introduces the technology for Polishing diamond thin film under researching and applying nowadays. Its principle features and application field are analysed and summerised.
出处
《机械设计与制造工程》
1998年第4期3-6,共4页
Machine Design and Manufacturing Engineering
关键词
金刚石薄膜
抛光
热化学抛光
激光烧蚀
Diamond thin film Polishing technolgy Thermo-Chemical polishing Laser-induced thermo corrosion Ion-beam irrediation
