评定三坐标测量机的动态误差

Assessing the Dynamic Errors of Coordinate Measuring Macbines

对三坐标测量机的动态误差作出整体分析。分析影响坐标测量机动态误差的主要因素。指出由于附加惯性力的影响产生的各部件绕气浮导轨联结处的偏转和各运动部件本身的弯曲变形是造成动态误差的主要原因。提出由动态偏转角误差推导测头动态位移误差的方法。用激光干涉仪和电感测做仪对三坐标测量机的动态偏转角误差进行了测量。理论和实验结果证明，在高速测量过程中，由于附加惯性力的影响，除了各部件绕气浮导轨联结处产生较大偏转外，某些低刚度运动部件本身也产生了较大的弯曲变形。

An overall analysis of the dynamic errors of coordinate measuring machines (CMM ) is made and the main factors affecting the dy-namic errors of CMMs are analyzed in this paper. lt is pointed out that the rotation of the parts about the joints connected with airbearings and the bending of the parts caused by the dynamic inertial forces are the main resourses that bring dynamic errors. A method for obtaining the displacement errors of the probe from dynamic rotational errors is presented.The dynamic rotational errors are measured with a laser interferometer and inductive displacement sensors. Both of theoretical and experimental results show that during fast probing process there are not only large rotation of the parts about the joints connected with airbearings but also large bending of the weak parts themselves,because of dynamic inertial forces.