BDD电极电化学氧化清洗工艺氧化性研究

Study of Electrochemical Oxidation of New Type of Cleaning Method with BDD Film Anode

为了改进现有的RCA清洗法以及臭氧/过氧化氢湿式清洗技术,利用金刚石膜(BDD)电极的高级电化学氧化技术生成过氧化物氧化有机物,以实现简化清洗设备及节能环保。为研究金刚石膜电极的氧化能力,电解不同浓度的硫酸钾溶液,通过高锰酸钾滴定法进行氧化性的测量,研究原料浓度对生成过氧硫酸盐浓度的影响;通过添加KOH调节pH值,研究pH值对电化学制备过氧化物的影响,用该电化学氧化方法与RCA清洗法进行清洗效果对比。实验结果显示,金刚石膜电化学氧化能力可以通过阳极电解液浓度以及pH值的调整得到控制,清洗效果在Si片表面粗糙度方面明显优于传统的RCA清洗法,而且更加节能环保。

To improve the RCA cleaning method, as well as ozone and hydrogen peroxide wet cleaning technology, a new cleaning method was developed to generate peroxide using of the boron-doped diamond （BDD） films as anode in electrochemical oxidation technology, with simplification equipment, which could also save energy. In order to study the oxidation capacity of electrochemical oxidation with diamond film electrode, the peroxide oxidation concentration with different concentration of raw materials to show the result. It also studies the impact of peroxide was measured by changing the pH value of the electrochemical preparation. The experimental results show that the electrochemical oxidation with diamond films anode is under control by adjusting the electrolyte concentration and the pH value. It also shows that the result in roughness of the surface cleaned by this new method is better than that by the traditional RCA cleaning method. And it is more energy saving and environmental protection.