摘要
随着微电子技术的发展,对清洗技术的要求也越来越严格。LCD由于低功耗、高画质和轻巧等优势,已作为平板显示领域的主导技术。采用金刚石膜电化学的强氧化物质对液晶盒上的残留有机物进行清洗,通过实验得出较好的清洗的氧化浓度和清洗时间,通过显微镜观察,电化学清洗能够有效去除有机物污染,对比了一般清洗与电化学清洗效果,得出了更适合清洗残留有机物的方法。
With the development of microelectronic, cleaning is becoming increasingly serious. LCD becomes the dominant technology in the area of flat display with advantages such as lower cost, high quality of image. The electrochemical oxidant electrolyte was adopted to clean the residual organic contaminants of LCD. Through experiments, better concentration of oxidant electrolyte and cleaning time were found. The results show that the organic contaminants can be removed effectively by this method. Compared with general cleaning method, a even better method for cleaning organic contaminants was found.
出处
《半导体技术》
CAS
CSCD
北大核心
2009年第9期837-839,共3页
Semiconductor Technology
基金
02国家重大专项(2009zx02308)
国家自然科学基金(10676008)
关键词
电化学
液晶显示器
清洗
表面污染
有机物
electrochemical
LCD
cleaning
surface contamination
organic contaminants
